Modular UHV Compatible Linear Translation Stage

Our ultra high vacuum compatible modular linear translation stages provide translation for loads of up to several tens of kilograms. They can be used standalone or as part of a complex motion system, as they are compatible with the range of M-VSM17 modular stages. They have very high rigidity, which is necessary where several transporters are stacked for compound motion or where offset loads are present. They are manufactured with UHV compatible material and construction methods and utilise UHV stepper motors.

Features:

• Standard travels from 50 mm to 200 mm.
• 5 µm Resolution (1 µm for option HR).
• Better than 0.5 μm repeatability.
• Traverses up to 5 or 15 mm/sec.
• Suitable for use to 1 x 10^-10 mBar.
• UHV-prepared aluminium construction as standard.
• Stainless steel construction available (option SS).
• Bakeable to 150°C (200°C for option SS).*
• Features M-D35.1 stepper motor.
• Can optionally be fitted with limit switches or an optical encoder.
• High resolution, radiation resistant and dry lubricated versions available.
• Directly stackable for XYZ orientations.
• Compatible with all VSM17 modular stages and accessories.
• May be customised for specific requirements.

Modular UHV Compatible Z Translation Stage

Our ultra high vacuum compatible vertical linear translation stages for z-axis translation of loads up to 30 kg.
They can be used standalone or as part of a complex motion system, as they are compatible with the range of M-VSM17 modular stages. The M-VSM17-Z is designed specifically for Z-axis translation with its high load capacity. They are manufactured with UHV compatible material and construction methods and utilise UHV stepper motors.

Features:

• Standard travels from 50 mm.
• 1 µm Resolution.
• 26 μm repeatability.
• Maximum speed of 5 mm/sec.
• Suitable for use to 1 x 10-10 mBar.
• Bakeable to 200°C.*
• 30kg centred load capacity.
• Features M-D35.1 stepper motor.
• Can optionally be fitted with limit switches or an optical encoder.
• High resolution, radiation resistant and dry lubricated versions available.
• Designed for Z-axis translation.
• Compatible with all VSM17 modular stages and accessories.
• May be customised for specific requirements.

Modular UHV Compatible Rotation Stage

Our ultra high vacuum compatible rotation stages are manufactured with UHV compatible material and construction methods in an ISO-7 cleanroom and utilise M-D35.1 UHV stepper motors.
The M-VSM17-R stages feature a precision cross-roller ring bearing system, providing high rotational accuracy capable of bearing loads in every direction. It has a 18 mm clear aperture, anti-backlash spur  gearing and can optionally be fitted with an optical UHV compatible rotary encoder.

Features:

• 360° rotation stage.
• 0.1° – 0.005° Resolution.
• Better than resolution unidirectional repeatability.
• Maximum loaded speed of up to 100rpm.
• Maximum torque of up to 8 Nm.
• Suitable for use to 1 x 10-10 mBar.
• Bakeable to 200°C.*
• UHV-prepared aluminium construction as standard.
• 100kg centre load capacity.
• Features M-D35.1 stepper motor.
• Can optionally be fitted with limit switches or an optical encoder.
• High resolution, radiation resistant versions available.
• Directly stackable for XYZ orientations.
• Compatible with VSM17 modular stages and accessories.
• May be customised for specific requirements.
• Lubricated with NyeTorr®6300 grease.

Modular UHV Compatible Goniometer Stage

Our ultra high vacuum compatible goniometer stages with ±15° / ±180° travel, provide rotation on a transverse axis above the table.
Can be used standalone or as part of a complex motion system when combined with other M-VSM17 modular stages. It is possible to build a Euler goniometer with a common centre of rotation when combined with an M-VSM17-G-114./ M-VSM17-G-070
The VSM17-G features rigid construction to allow for high load capacity whilst maintaining smooth motion through the full range of travel. They are manufactured with UHV compatible material and construction methods and utilise UHV stepper motors.

Features:

• ±15° / ±180°Travel.
• .005° Resolution.
• Rotation centre to table 70mm / 114mm.
• Suitable for use below 1 x 10-10 mBar.
• Bakeable to 200°C.
• 40kg / 20kg centre load capacity.
• Features M-D35.1 stepper motor.
• Can optionally be fitted with limit switches.
• High torque and radiation resistant versions available.
• Directly stackable for XYZ orientations.
• Compatible with most VSM17 modular stages and accessories.
• May be customised for specific requirements.
• Lubricated with NyeTorr®6300 grease.

* – Assembly rating must be reduced to that of lowest rated component