Fused Silica Viewports – EUV Grade
P.O.A
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TECHNICAL SPECS – CLICK HERE
Fused Silica Viewports – EUV Grade
Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV, DUV, and Excimer UV with window material HPFS® fused silica in varying grades. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.
Features:
• UHV compatible.
• Synthetic fused silica
• Weldable versions available.
Specifications:
Materials
Window : Corning HPFS® 7980 Excimer grade 193 fused silica
Carrier : St.St.
Flanges : St.St.
Max. Bakeout Temperature* :
CF flanged viewports : 200°C
KF flanged viewports : 150°C
Weldable viewports : 200°C
Max. Thermal Gradient : 25°C per minute
| Optical properties | |||
| UV Grade | DUV Grade | EUV Grade | |
| Surface finish : | 40/20 scratch/dig | 20/10 scratch/dig | 20/10 scratch/dig |
| TWD : | 10λ @ 632nm (peak to valley) | λ/4 @ 632nm (peak to valley) | λ/4 @ 632nm (peak to valley) |
| UV transmission : | @ 250nm (external) >90% | @ 248nm (internal) >99.8% | @ 193nm (internal) >99.5% |
| Parallelism : | <30 arc minutes | <30 arc minutes | <10 arc seconds |
| Homogeneity grade : | F | A | A |
| Inclusion class : | 2 | 0 | 0 |
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* – Assembly rating is reduced to that of the lowest rated component.
Anti-Reflective Coating :- Anti-reflective coatings are available, please call our sales office to discuss your specific requirements.
| Product Code | Fig. | Flange | A | B | C | D | E | F | Price | Quantity | PDF & STP | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| FSVP-EUV-16CF | 1 | DN16CF | 16.0 | 2.5 | 4.3 | 8.9 | - | - | €561 | |||
| FSVP-EUV-40CF | 1 | DN40CF | 35.5 | 3.2 | 8.9 | 12.7 | - | - | €758 | |||
| FSVP-EUV-63CF | 1 | DN63CF | 68.3 | 6.4 | 10.4 | 17.3 | - | - | €1,691 | |||
| FSVP-EUV-100CF | 1 | DN100CF | 98.5 | 6.4 | 13.0 | 19.8 | - | - | €2,855 | |||
| FSVP-EUV-160CF | 1 | DN160CF | 136.6 | 9.4 | 12.2 | 22.4 | - | - | €4,682 | |||
| FSVP-EUV-63LF | 2 | DN63LF | 68.3 | 6.4 | 14.6 | 11.9 | 21.1 | - | €1,326 | |||
| FSVP-EUV-100LF-68 | 2 | DN100LF | 68.3 | 6.4 | 9.2 | 11.9 | 15.7 | - | €1,393 | |||
| FSVP-EUV-100LF | 2 | DN100LF | 98.5 | 6.4 | 18.2 | 11.9 | 24.6 | - | €2,790 | |||
| FSVP-EUV-160LF-98 | 2 | DN160LF | 98.5 | 6.4 | 11.8 | 11.9 | 18.3 | - | €2,947 | |||
| FSVP-EUV-160LF | 2 | DN160LF | 136.6 | 9.4 | 10.1 | 11.9 | 19.8 | - | €4,835 | |||
| FSVP-EUV-200LF | 2 | DN200LF | 136.6 | 9.4 | 12.4 | 11.9 | 21.8 | - | P.O.A | |||
| FSVP-EUV-34.8-W | 3 | WELD | 34.8 | 3.2 | 17.3 | 44.7 | 21.6 | 38.1 | €712 | |||
| FSVP-EUV-60.2-W | 3 | WELD | 60.2 | 6.4 | 20.1 | 73.2 | 27.9 | 63.5 | €1,819 |






