Fused Silica Viewports – EUV Grade

kodial viewports-1

Fused Silica Viewports – EUV Grade

P.O.A

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TECHNICAL SPECS – CLICK HERE

Fused Silica Viewports – EUV Grade

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV, DUV, and Excimer UV with window material HPFS® fused silica in varying grades. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Features:
UHV compatible.
Synthetic fused silica
Weldable versions available.

Specifications:
Materials
Window : Corning HPFS® 7980 Excimer grade 193 fused silica
Carrier : St.St.
Flanges : St.St.

Max. Bakeout Temperature* :
CF flanged viewports : 200°C
KF flanged viewports : 150°C
Weldable viewports : 200°C

Max. Thermal Gradient : 25°C per minute

Optical properties
UV Grade     DUV Grade EUV Grade
Surface finish : 40/20 scratch/dig   20/10 scratch/dig 20/10 scratch/dig
TWD : 10λ @ 632nm (peak to valley)  λ/4 @ 632nm (peak to valley) λ/4 @ 632nm (peak to valley)
UV transmission : @ 250nm (external) >90% @ 248nm (internal) >99.8% @ 193nm (internal) >99.5%
Parallelism :  <30 arc minutes       <30 arc minutes       <10 arc seconds
Homogeneity grade : F A A
Inclusion class : 2 0 0

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* – Assembly rating is reduced to that of the lowest rated component.

Anti-Reflective Coating :- Anti-reflective coatings are available, please call our sales office to discuss your specific requirements.


Product CodeFig.FlangeABCDEFPriceQuantityPDF & STP
FSVP-EUV-16CF 1 DN16CF 16.0 2.5 4.3 8.9 - - 561
FSVP-EUV-40CF 1 DN40CF 35.5 3.2 8.9 12.7 - - 758
FSVP-EUV-63CF 1 DN63CF 68.3 6.4 10.4 17.3 - - 1,691
FSVP-EUV-100CF 1 DN100CF 98.5 6.4 13.0 19.8 - - 2,855
FSVP-EUV-160CF 1 DN160CF 136.6 9.4 12.2 22.4 - - 4,682
FSVP-EUV-63LF 2 DN63LF 68.3 6.4 14.6 11.9 21.1 - 1,326
FSVP-EUV-100LF-68 2 DN100LF 68.3 6.4 9.2 11.9 15.7 - 1,393
FSVP-EUV-100LF 2 DN100LF 98.5 6.4 18.2 11.9 24.6 - 2,790
FSVP-EUV-160LF-98 2 DN160LF 98.5 6.4 11.8 11.9 18.3 - 2,947
    FSVP-EUV-160LF 2 DN160LF 136.6 9.4 10.1 11.9 19.8 - 4,835
    FSVP-EUV-200LF 2 DN200LF 136.6 9.4 12.4 11.9 21.8- P.O.A
    FSVP-EUV-34.8-W 3 WELD 34.8 3.2 17.3 44.7 21.6 38.1 712
    FSVP-EUV-60.2-W 3 WELD 60.2 6.4 20.1 73.2 27.9 63.5 1,819
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