Fused Silica Viewports – EUV Grade

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV grade with window material HPFS^® fused silica standard grade, DUV grade with window material HPFS_^® fused silica KrF grade, and Excimer UV with window material HPFS^® fused silica ArF grade. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Features:
• UHV compatible.
• Synthetic fused silica
• Weldable versions available.

Specifications:
Materials
Window : Corning HPFS^® 7980 Excimer grade 193 fused silica
Carrier : St.St.
Flanges : St.St.

Max. Bakeout Temperature* :
CF flanged viewports : 200°C
KF flanged viewports : 150°C
Weldable viewports : 200°C

Max. Thermal Gradient : 25°C per minute

Optical properties
Surface finish : 20/10 scratch/dig
Flatness : λ/4 @ 632nm transmitted wavefront
UV transmission @ 193nm (internal) : ≥99.5%
parallelism : <10 arc seconds
Homogeneity grade : A
Inclusion class : 0
___________________________________________
* – Assembly rating is reduced to that of the lowest rated component.

Anti-Reflective Coating :- Anti-reflective coatings are available, please call our sales office to discuss your specific requirements.