Fused Silica Viewports – 193nm ArF Excimer Laser

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV grade with window material HPFS^® fused silica standard grade, DUV grade with window material HPFS_^® fused silica KrF grade, and Excimer UV with window material HPFS^® fused silica ArF grade. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Features:
• UHV compatible.
• Synthetic fused silica

Specifications:
Materials
Window : Corning HPFS^® 7980 fused silica
Carrier : St.St.
Flanges : St.St.

AR coatings are non-hygroscopic

Max. Bakeout Temperature* :
CF flanged viewports : 200°C
Max. Thermal Gradient : 25°C per minute

Optical properties
Parallelism : <10 arc seconds
Flatness : λ/4 @ 632nm transmitted wavefront
Surface finish : 20/10 scratch/dig
Laser damage threshold : 1J/cm² for 10ns pulse
Coating : V-coat 193nm. R<0.25% per surface. Transmission > 99.5%
Homogeneity grade : A
Transmission grade : Excimer
Inclusion class : 0
___________________________________________
* – Assembly rating is reduced to that of the lowest rated component.