Fused Silica Viewports – UV Grade – Non Magnetic – Titanium

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV grade with window material HPFS^® fused silica standard grade, DUV grade with window material HPFS_^® fused silica KrF grade, and Excimer UV with window material HPFS^® fused silica ArF grade. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Please Note :
Mounting Titanium viewports to Stainless steel flanges can be prooblematic, as differing material hardness & thermal expansion cause problems with the Copper gasket seal.

Features:
• All titanium construction
• UHV compatible.
• Synthetic fused silica

Specifications:

Materials
Window : Corning HPFS^® 7980 fused silica 
Carrier : Titanium
Flanges : Titanium

Max. Bakeout Temperature* :
CF flanged viewports : 200°C

Max. Thermal Gradient : 25°C per minute

Optical properties

                                  UV Grade                               DUV Grade                             EUV Grade
Surface finish :             40/20 scratch/dig                    20/10 scratch/dig                     20/10 scratch/dig
Flatness :                                                                                                               λ/4 @ 632nm transmitted wavefront
UV transmission :         @ 250nm (external) >90%      @ 248nm (internal) >99.8%      @ 193nm (internal) >99.5%

parallelism :                 <30 arc minutes                      <10 arc seconds                      <10 arc seconds
Homogeneity grade :    F                                            A                                            A
Inclusion class :           2                                            0                                            0
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* – Assembly rating is reduced to that of the lowest rated component.

Anti-Reflective Coating :- Anti-reflective coatings are available, please call our sales office to discuss your specific requirements.