Two Channel Thin Film Deposition Thickness / Rate Monitor


Two Channel Thin Film Deposition Thickness / Rate Monitor


Technical Specs

Two Channel Thin Film Deposition Thickness / Rate Monitor

The TF-STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price.
TF-STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process, or use alloy mode for codeposition monitoring. Independent mode allows TF-STM-2XM to function
as two completely separate monitors.
Two sensor inputs allow for the use of two single quartz crystal sensors or one dual quartz crystal sensor. Ten measurements are taken per second while achieving a resolution of 0.037 Å per measurement.

The TF-STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analogue outputs allowing for a level of integration usually reserved for more expensive instruments.
Programmable features include shutter delay, time/power monitoring, and rate sampling. Use all of these features to achieve the most accurate readings and the longest crystal life.
Operate and monitor TF-STM-2XM through the simple front panel interface or program the TF-STM-2XM through the included LabVIEW® software. This simple software can be an on-line or off-line editor for films and system parameters and is easy to use.

TF-STM-2XM features a high contrast LCD display and intuitive menu system. On-screen hints can be found throughout the menus for simple, guided programming and operation. The easy-to-read LCD can display in accumulated mass or thickness.


Two measurement channels.
Four analogue outputs for rate, rate deviation or thickness.
Eight programmable digital inputs.
Eight programmable digital outputs.
High accuracy at 10 readings per second.
Display mass or thickness.
Codeposition monitoring capabilities.



Sensor inputs : Two
Compatible sensors : Single/shuttered single or dual
Measurement frequency : 6.0 to 5.0 MHz
Frequency resolution : ±0.03Hz at 6MHz
Ref. frequency stability : ±2 ppm
Resolution : ±0.037Å
Measurement interval : 0.1s
Display mode : Thickness / Mass
Digital inputs : Eight
Digital outputs : Eight
Analogue inputs : Four
Analogue output rating : 0 to ±10V, 10mA
Relay rating : Up to 48VDC/VAC, 2A
Mains power supply : 100-240VAC, 50/60Hz, 2.5VA

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