Multi-Channel Thin Film Deposition Thickness / Rate Monitor

SQM160-1

Multi-Channel Thin Film Deposition Thickness / Rate Monitor

£171£1,600


TECHNICAL SPECS – CLICK HERE

Multi-Channel Thin Film Deposition Thickness / Rate Monitor

The TF-SQM160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analogue rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the TF-SQM160 to control source or sensor shutters, signal time and thickness set points, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings. The SQM160 comes with an RS-232 port and Windows® software that allows instrument setup from your computer. The software can be used to set and store all parameters, operate the instrument, and save process data in an Excel® file format. USB or Ethernet options add to the communications flexibility.

EASY TO USE
To start rate and thickness measurements, press zero to null the last thickness reading, then Shutter to open the source or sensor shutter. The large, bright LEDs simultaneously show thickness and rate readings that are visible from across the room. When the desired thickness is reached, or time has elapsed, the shutter closes and the appropriate front panel annunciators light. Press the Xtal Life button at any time to view the remaining crystal life. Two menus control instrument setup for the 99  stored films. To access the menus, press Program. Turn the setting knob to select/edit parameters. The main display shows menu prompts, and values are shown in the auxiliary (Time) display.

HIGH ACCURACY, LOW COST
Standard frequency resolution is 0.12Hz at four readings per second. The high accuracy option increases resolution to 0.03Hz at 10 readings per second. Temperature  stability is 2ppm over the entire operating range. This combination of high accuracy and high stability are unmatched in an instrument at this price!

Specifications:
QCM Sensor Inputs : Standard : 2 / Optional : 6
Frequency Range : 1-6.5MHz
Frequency Resolution :
  Standard : ±0.12Hz @ 4 readings /sec
  Optional : ±0.03Hz @ 10 readings /sec
Frequency Stability : ± 2 ppm total, over 0-50°C
Selectable Measurement Period : 0.10 to 2 sec (in .05 sec increments)
Measurement Filter : 1 to 20 readings
Stored Films : 99
Analogue Outputs : Two 0 to 5VDC, rate & thickness
Digital Inputs/Outputs : Two inputs, four relay outputs
Digital Interface :
  Standard : RS232
  Optional : USB or Ethernet
Power : 100-120 /200-240 VAC, 50.60Hz, 20W
Housing / Mounting : 1/2-rack, 89mm high, 89x213x197mm
Weight : 2.7kg
Windows Software : Provides remote set-up and operation, data-logging functions.


Product CodeDescriptionPriceQuantityPDF & STP
TF-SQM160-S-2-R2 CHANNEL THICKNESS / RATE MONITOR. RS232 ONLY £1,436
    TF-SQM160-H-2-R HIGH RESOLUTION 2 CHANNEL THICKNESS / RATE MONITOR RS232 ONLY £1,600
      Change 2 to 6 6 CHANNEL UPGRADE FOR TF-SQM-160 £756
        Change R to U ADDITONAL USB INTERFACE FOR TF-SQM-160 £171
          Change R to E ADDITONAL ETHERNET INTERFACE FOR TF-SQM160 £300
            TF-SQM160/CI-100-19RM1 19” RACK ADAPTER FOR 1 SQM-160 OR CI-100 INSTRUMENT   £227
              TF-SQM160/CI-100-19RM2 19” RACK ADAPTER FOR 2 SQM-160 OR CI-100 INSTRUMENTS   £187
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