Fused Silica Viewports – EUV Grade – Non Magnetic – Titanium

FS VP tit

Fused Silica Viewports – EUV Grade – Non Magnetic – Titanium

£2,125

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Technical Specs

Fused Silica Viewports – EUV Grade – Non Magnetic – Titanium

Fused silica viewports offer increased transmission of UV and IR wavelengths. We offer fused silica viewports in three grades; UV grade with window material HPFS® fused silica standard grade, DUV grade with window material HPFS® fused silica KrF grade, and Excimer UV with window material HPFS® fused silica ArF grade. We also offer a range of anti-reflection coated fused silica viewports which have an anti-reflective coating applied to both sides of the vacuum window, achieving maximised transmission for various laser types.

Features:
All titanium construction
UHV compatible.
Synthetic fused silica

Specifications:
Materials
Window : Corning HPFS® 7980 fused silica
Carrier : Titanium.
Flanges : 316LN St.St.

Max. Bakeout Temperature* :
CF flanged viewports : 200°C

Max. Thermal Gradient : 25°C per minute

Optical properties

                                  UV Grade                               DUV Grade                             EUV Grade
Surface finish :             40/20 scratch/dig                    20/10 scratch/dig                     20/10 scratch/dig
Flatness :                                                                                                               λ/4 @ 632nm transmitted wavefront
UV transmission :         @ 250nm (external) >90%      @ 248nm (internal) >99.8%      @ 193nm (internal) >99.5%

parallelism :                 <30 arc minutes                      <10 arc seconds                      <10 arc seconds
Homogeneity grade :    F                                            A                                            A
Inclusion class :           2                                            0                                            0
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* – Assembly rating is reduced to that of the lowest rated component.

Anti-Reflective Coating :- Anti-reflective coatings are available, please call our sales office to discuss your specific requirements.


Product CodeFlangeABCDPriceQuantityPDF & STP
FSVP-EUV-63CF-TI DN63CF 68.3 6.4 10.4 17.3 £2,125
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